sibsutisВестник СибГУТИThe Herald of the Siberian State University of Telecommunications and Information Science1998-6920СибГУТИ10.55648/1998-6920-2023-17-3-87-105sibsutis-780Research ArticleСтатьиОптимизация топологий интегральных катушек индуктивности для синтеза СВЧ LC-фильтров в Si/SiGe/GaAs-системах на кристаллеIntegrated Inductor Layout Optimization for Synthesis of Microwave LC-Filters in Si/SiGe/GaAs Systems on a Chiphttps://orcid.org/0000-0002-2520-1330ЕрохинВ. В.ErokhinV. V.

Ерохин Виктор Валерьевич - Научный сотрудник НИИРП НИЛ «Системы на кристалле» ОмГТУ.

644050, Омск, пр. Мира 11

Viktor V. Erokhin - Research scientist, «Systems on Chip» research laboratory OmSTU.

Omsk

viktor_erohin@mail.ruhttps://orcid.org/0000-0001-5114-2074ЗавьяловС. А.ZavyalovS. A.

Завьялов Сергей Анатольевич – кандидат технических наук, старший научный сотрудник НИИРП НИЛ «Системы на кристалле» ОмГТУ.

644050, Омск, пр. Мира 11

Sergey A. Zavyalov - PhD in Technical Sciences, senior research scientist, «Systems on Chip» research laboratory OmSTU.

Omsk

zavyalov62@mail.ruОмский государственный технический университет (ОмГТУ)РоссияOmsk State Technical University (OmSTU)Russian Federation20232809202317387105Copyright © Ерохин В.В., Завьялов С.А., 20232023Ерохин В.В., Завьялов С.А.Erokhin V.V., Zavyalov S.A.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://vestnik.sibsutis.ru/jour/article/view/780

В статье предложены модели планарных симметричных восьмиугольных катушек индуктивности, отличающиеся методом расчета индуктивности и учетом структуры и характеристик технологического процесса. Выведены формулы в закрытой форме для расчета характеристик моделей интегральных планарных катушек индуктивности различных конфигураций. Модели верифицированы путем сравнения АЧХ разработанной модели полосового фильтра (с частотами среза 14 ГГц и 18 ГГц) с АЧХ произведенных экспериментальных образцов в технологическом процессе SiGe 130 нм. АЧХ произведенных образцов фильтра находятся в диапазоне АЧХ разработанной модели фильтра в крайних точках технологического разброса. Предложен алгоритм оптимизации топологий интегральных планарных катушек индуктивности по критерию максимальной добротности на требуемой частоте. Синтез интегральных LC-фильтров в технологических процессах Si, SiGe и GaAs с использованием разработанного алгоритма оптимизации топологий интегральных катушек индуктивности позволяет минимизировать потери в полосе пропускания и максимизировать крутизну АЧХ. Программная реализация алгоритма оптимизации выполнена в ПО Mathcad. Программный расчет оптимальной топологии катушки индуктивности по критерию максимальной добротности занимает десятки секунд – единицы минут в зависимости от сложности структуры технологического процесса.

The paper proposes models of planar symmetric octagonal inductors that differ in the method of inductance calculating and consideration of the structure and characteristics of the technological process. The equations in a closed form for calculating models of integral planar inductors of various configurations are derived. The models were verified by comparing the frequency response of the developed 14-18 GHz bandpass filter model with the frequency response of experimental samples produced in the SiGe 130 nm process. The AFC of the produced filter samples is in the range of the developed filter model AFCs at the extreme points of the manufacturing tolerance. The developed algorithm of optimization for integral planar inductors layouts according to the criterion of maximum quality factor at the required frequency is presented. The use of the developed algorithm for integral planar inductors layouts optimization makes it possible to synthesize integrated LC-filters in Si, SiGe and GaAs technological processes with minimal passband losses and maximum gain slopes. The optimization algorithm is implemented as the program in the MathCad software. The optimal inductor layout calculation according to the criterion of maximum quality factor in the program takes tens of seconds a few minutes depending on the technological process structure complexity.

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The authors declare that there are no conflicts of interest present.