Membrane micropumps in MEMS technology
Abstract
This paper presents a brief overview of membrane micropumps structure. Various actuators, their advantages and disadvantages are discussed. Different types of microvalves used in membrane micropump, their structure and operating principle are also considered.
References
1. Waseem A. M., Shahzadi T., Asim N., Nitin A. MEMS based system for drug delivery // 6th International Conference on Emerging Technologies. Islamabad, Pakistan, 2010. P. 82-87.
2. Nisar A., Afzulpurkar N., Mahaisavariya B., Tuantranont A. MEMS-based micropumps in drug delivery and biomedical applications // Sensors and Actuators B. 130. 2008. P. 917-942.
3. Xue-feng H., Sheng-ji L., Guan-qing W., Dan L., Yan L., Ning D., Jiang-rong X. Micropump application for micro power systems: A review // IEEE Asia-Pacific Power and Energy Engineering Conference (APPEEC). Wuhan, China, 2011. P. 1-4.
4. Левицкий А. А., Левицкая З. В., Ситников А. М. Компоненты микросистемной техники. Лабораторный практикум. Учебное пособие. СФУ, Красноярск. 2007. 85 с.
5. Linnemann R., Woias P., Senfft C.-D., Ditterich J. A. A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases // in: Proceedings of the MEMS98. Heidelberg, Germany, 1998. P. 532-537.
6. Machauf A., Nemirovsky Y., Dinnar U. A membrane micropump electrostatically actuated across the working fluid // J. Micromech. Microeng. 15. 2005. P. 2309-2316.
7. Jeong O. C., Yang S. S. Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm // Sens. Actuators A: Phys. 83. 2000. P. 249-255.
8. Gong Q., Zhou Z., Yang Y., Wang, Design X. Design, optimization and simulation on microelectromagnetic pump // Sens. Actuators A: Phys. 83. 2000. P. 200-207.
9. Zou J. X., Ye Y. Z., Zhou Y., Yang Y. A novel thermally actuated silicon micropump // in: Proceedings of the 1997 International Symposium on Micromechatronics and Human Science. 1997. P. 231-234.
10. Xu D., Wang L., Ding G., Zhou Y., Yu A., Cai B. Characteristics and fabrication of NiTi/Si diaphragm micropump // Sens. Actuators A: Phys. 93. 2001. P. 87-92.
11. Guo S., Fukuda T. Development of the micropump using ICPF actuator // in: Proceedings of IEEE International Conference on Robotics and Automation. 1. 1997. P. 266-271.
12. Jang L.-S., Li Y.-J., Lin S.-J., Hsu Y.-C., Yao W.-S., Tsai M.-C., Hou C.-C. A stand-alone peristaltic micropump based on piezoelectric actuation // Biomed Microdevices 9. 2007. P. 185-194.
13. Zengerle R., Richter A., Sandmaier H. A micro membrane pump with electrostatic actuation // IEEE Micro Electro Mechanical Systems. Travemunde, Germany, 1992. P. 19-24.
14. Matsumoto S., Maeda R., Klein A. Characterization of a valveless micropump based on liquid viscosity // Microscale Thermophysical Engineering 3(1). 1999. P. 31-42.
15. Olsson A., Stemme G., Stemme E. Numerical and experimental studies of flat-walled diffuser elements for valve-less micropump // Sensors and Actuators A. 84. 2000. P. 165-175.
16. Gamboa A. R., Morris C. J., Forster F. K. Improvements in fixedvalve micropump performance through shape optimization of valves // Journal of Fluids Engineering. 127. 2005. P. 339-346.
Review
For citations:
Palagin M... Membrane micropumps in MEMS technology. The Herald of the Siberian State University of Telecommunications and Information Science. 2017;(2):77-86. (In Russ.)
Views:
793
Email this article 