For citations:
Palagin M... Membrane micropumps in MEMS technology. The Herald of the Siberian State University of Telecommunications and Information Science. 2017;(2):77-86. (In Russ.)
Palagin M... Membrane micropumps in MEMS technology. The Herald of the Siberian State University of Telecommunications and Information Science. 2017;(2):77-86. (In Russ.)