Preview

The Herald of the Siberian State University of Telecommunications and Information Science

Advanced search

Parameters calculation of a logical channel for a secondary user in a group of two AlGaN/GaN Schottky barrier diodes with Ta, Ni, WSi and TiN anodes

Abstract

In this paper, AlGaN/GaN lateral Schottky barrier diodes (SBD) with anodes based on Ta, Ni, WSi and Ta are considered. Heterostructure AlGaN/i-GaN/buffer GaN was grown by Metal Organic Chemical Vapor Deposition (MOCVD) on silicon (111) substrate. All diodes had 5 nm (50%) anodes recess. Anode-cathode distance was varied from 3 to 7 цт. Diodes periphery (anodes width, W) was 10 mm. Diodes turn-ON voltage (by forward current 1 mA/mm) critically depends on anodes material and was 0.25 V, 0.45 V, 0.65 V and 1.6 V for Ta, Ni, WSi and TiN anodes respectively. Specific leakage current also depends on anodes material and was 67 цЛ/тт, 13 цЛ/тт, 5 цЛ/тт and 0.85 цЛ/тт for Ta, Ni, WSi and TiN respectively.

About the Authors

I. .. Fedin
АО НПФ «Микран»
Russian Federation


E. .. Erofeev
НИИСЭС ТУСУР
Russian Federation


V. .. Fedina
ТУСУР
Russian Federation


References

1. Seikoh Yoshida, Nariaki Ikeda, Jiang Li, Takahiro Wada, Hiroshi Kambayashi, and Hironari Takehara. High power AlGaN/GaN Schottky Barrier Diode with 1000 V operation // Mater. Res. Soc. Symp. Proc. 2006. V. 892. P. 0892-FF05-02.1-0892-FF05-02.6.

2. Seung-Chul LEE, Min-Woo HA, Ji-Yong LIM, Jin-Cherl HER, Kwang-Seok SEO andMin-Koo Han. Suppression of Leakage Current of Ni/Au Schottky Barrier Diode Fabricated on AlGaN/GaN Heterostructure by Oxidation // Jap. Journ. of Appli. Phys. 2006. V. 45, № 4B. P. 3398-3400.

3. Cao Dong-Sheng, Lu Hai, Chen Dun-Jun, Han Ping, Zhang Rong, Zheng You-Dou. A 1100+ V AlGaN/GaN-Based Planar Schottky Barrier Diode without Edge Termination // Chin. Phys. Lett. 2011. V. 28. P. 017303-1-017303-4.

4. Xing Lu, Chao Liu, Huaxing Jiang, Xinbo Zou, Anping Zhang, andKei May Lau. Ultralow reverse leakage current in AlGaN/GaN lateral Schottky barrier diodes grown on bulk GaN substrate // Appl. Phys. Expr. 2016. V. 9, №. 5. P. 031001-1-031001-4.

5. Saitoh Y. et al. Extremely low on-resistance and high breakdown voltage observed in vertical GaN Schottky barrier diodes with high-mobility drift layers on low-dislocation-density GaN substrates // Appl. Phys. Exp. 2010. V. 3, №. 8. P. 081001-1-081001-3.

6. Zhu M., Song B., Qi V., Hu Z., Nomoto K, Yan X., Cao Y., Johnson W., Kohn E., Jena D. 1.9-kV AlGaN/GaN Lateral Schottky Barrier Diodes on Silicon // IEEE El. Dev. Lett. 2015. V. 36, №. 4. P. 375-377.

7. Treidel E. B. et al. Fast GaN based Schottky diodes on Si(111) substrate with low onset voltage and strong reverse blocking // Phys. Status Solidi C. 2013. V. 10, №. 5. P. 849-852.

8. Chen W. et al. High-performance AlGaN/GaN lateral field-effect rectifiers compatible with high electron mobility transistors // Appl. Phys. Lett. 2008. V. 92, №. 25. P. 253501-1-253501-3.

9. Wang Y. et al. Ultra-low leakage and high breakdown Schottky diodes fabricated on freestanding GaN substrate // Semicond. Sci. Technol. 2011. V. 26, №. 2. P. 022002.

10. Hashimoto S. et al. High-purity GaN epitaxial layers for power devices on low-dislocation-density GaN substrates // J. Cryst. Growth. 2007. V. 298. P. 871-874.

11. Zhang Y. et al. GaN-on-Si vertical Schottky and p-n diodes // IEEE Electron Device Lett. 2014. V. 35, №. 6. P. 618-620.

12. Lee J.-H. et al. AlGaN/GaN-based lateral-type Schottky barrier diode with very low reverse recovery charge at high temperature // IEEE Trans. Electron Devices. 2013. V. 60, №. 10. P. 3032-3039.

13. Kamada A. et al. High-voltage AlGaN/GaN Schottky barrier diodes on Si substrate with low-temperature GaN cap layer for edge termination // 20th Int. Symp. Power Semiconductor Devices IC’s. 2008. P. 225-228.

14. Boles T. et al. >1200 V GaN-on-silicon Schottky diode // Phys. Status Solidi C. 2013. V. 10, №. 5. P. 835-839.

15. Lian Y.-W. et al. AlGaN/GaN Schottky barrier diodes on silicon substrates with selective Si diffusion for low onset voltage and high reverse blocking // IEEE Electron Device Lett. 2013. V. 34, №. 8. P. 981-983.

16. Hilt O., Brunner F, Cho E., Knauer A., Bahat-TreidelE., Wurfl J. Normally-off high voltage p-GaN gate GaN HFET with carbon-doped buffer // Proceeding of the 23rd International sympo-syum on power semiconductor devices and IC. San Diego, May 23-26, 2011. P. 239-242.


Review

For citations:


Fedin I..., Erofeev E..., Fedina V... Parameters calculation of a logical channel for a secondary user in a group of two AlGaN/GaN Schottky barrier diodes with Ta, Ni, WSi and TiN anodes. The Herald of the Siberian State University of Telecommunications and Information Science. 2018;(3):62-68. (In Russ.)

Views: 417


Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 License.


ISSN 1998-6920 (Print)